In semiconductor industry, miniaturization has always led to more fast and dense packed integrated circuits showing increased perfromance and efficiency. Although the limits of physical feasibility are within a certain reach, development undoubtedly continues to this day. Especially in the backend of semiconductor manufacturing the interconnecting, packaging and testing is continuing its miniaturization with steadily increasing demands on quality. Besides semiconductor components manufacturing Nanotechnology opens up completely new applications for classical materials being processed through semiconductor processes. The innovative development of measurement technology at Solarius keeps pace with this miniaturization and provides right metrology at the right time, ensuring robust results in the characterization of micro- and nanosystems.