A State-of-the-art DUAL SENSOR thickness platform for PRECISE and ACCURATE thickness measurement
Solarius has developed a thickness measurement platform that uses two precision-aligned non-contact sensors. This measurement approach is extremely fast and accurate and allows measuring the thickness of one or more layers on an object from both sides. For the dual-sensor thickness measurement, each side of the part is measured simultaneously, and the difference of measurements from the two sensors provides the final thickness measurement.
- Fast and accurate thickness measurement
- Modular design
- High throughput by a large measurement area
- Flexible and easy to automate
- Customized user interface
- Customized analysis
- Non-contact and non-destructive
The AOP-Thickness platform is equipped with a NanoPrecision XY stage with a measurement area up to 400 mm x 400 mm. Two high speed line or point sensors enable height measuring ranges between 2 mm and 145 mm with vertical resolutions of 0.2 µm up to 5 µm. Solarius SolarScan software provides automation features as well as customized recipes. The modular system design offers the highest flexibility for customized analysis tools.